Sumitomo (SHI) Cryogenics of America, Inc.
Creating A Better Tomorrow Through Innovative Solutions
Sumitomo (SHI) Cryogenics of America, Inc. (SCAI), part of the SHI Cryogenics Group, has driven the implementation of cryogenic technology in vacuum applications since the inception of APD Cryogenics in 1959. SHI Cryogenics Group serves customers with facilities around the world, while its renowned engineering departments in the United States and Japan continue to focus on the latest in cryogenics technology for the vacuum market, including innovative cryopump technologies.
SCAI is recognized for designing and introducing the cryogen-free cryopump in 1975, enabling low-cost, high volume commercial manufacturing of semiconductor and optical devices. Today, Marathon CP cryopump systems are offered in a variety of sizes and configurations. They are designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies. The patented pneumatic actuator design allows them to be readily serviced without the need to break vacuum or remove the cryopump from the chamber, affording users maximum production up-time and low cost of ownership.
In addition to cryopumps, SHI Cryogenics Group manufactures both 4K and 10K cryocoolers, pulse tubes, shield coolers and laboratory cryostats for the semiconductor, research, optical coating and medical industries. As always, SCAI s customers benefit from performance reliability, leading edge technology and a global sales and support network.