Fil-Tech, Inc.


Fil-Tech has supplied semiconductor, ophthalmic, and optical coating industries with competitively priced consumables from stock for over 50 years. Fil-Tech is a family owned and operated business established in 1969 by Paul Becker and now owned and operated by his daughter, Paula Becker. We supply quality and savings on products from stock worldwide.

Fil-Tech offers vacuum measurement gauges including Bayard Alpert and nude ionization gauges, thermocouple gauges, InstruTech convection gauges, and INFICON vacuum gauges. Visit us for a complete line of fluids for mechanical and diffusion pumps including Krytox fluids and greases, FT704 and FT705 diffusion pump fluids, hydrocarbon oils, and Santovac 5. Fil-Tech supplies electron beam gun emitter assembly parts for Temescal and Telemark guns, crucibles and crucible liners for your evaporation process, and replacement parts for Veeco Commonwealth Mark I and II and Ion Tech, and Satisloh ion sources.

In May 2021, Fil-Tech began a partnership with INFION. Fil-Tech sold its Quality Crystals product line to INFICON who will manufacture and supply the Fil-Tech brand crystals worldwide. Fil-Tech continues to supply its Quality Crystals in 6MHz and 5MHz sizes coated in Gold, Longer Life Gold® or Stress Relieving Alloy® and Extreme Temperature Crystals that operate to 200°C, to measure your deposited thin films. We also supply 1" and .550", 5MHz Liquid Plating Crystals in Au, Pt, Cu, SS, SiO2, Ni, Cr, and other materials. We manufacture single and dual sensor heads and feedthroughs on 1” bolts or 2 ¾” flanges and can custom manufacture hardware for you. Fil-Tech is now an authorized distributor for INFICON rate/thickness monitors and controllers. Select from SQM-160 or STM-2XM monitors or the XTC/3, SQC-310, IC6 or Cygnus 2 controllers at competitive prices.

You can reach us at 617-227-1133, order online at, or [email protected].

Our History

Fil-Tech is a family owned and operated business established in 1969, by the Beckers. After working for years as a salesman in the semiconductor industry, Paul Becker started Fil-Tech after recognizing the need for stock delivery of quality aftermarket consumables - at prices competitive to the original equipment manufacturers. Paul began by stocking and selling competitively priced quality leak detector filaments, vacuum ionization, and thermocouple gauge tubes to the semiconductor industry. In the late 1970's during a severe extended shortage of DC704 silicone fluid, Fil-Tech added FT704 to its product list and offered the market a competitively priced generic equivalent to DC704. Soon after, Fil-Tech began the manufacture and sale of replacement parts for electron beam and ion source guns and the sale of hydrocarbon fluids for mechanical and diffusion pumps. Fil-Tech was now concentrating on consumables in the thin film deposition industries as well as the semiconductor industry.

In the late 1980's, Paula Becker, joined Fil-Tech. At the same time, Fil-Tech became an authorized distributor for Du Pont for their PFPE Krytox fluids and greases. Fil-Tech also began distributing quartz crystals for a manufacturing startup company, Cold Springs R&D, Inc. In the years that followed, Fil-Tech became the principal customer of Cold Springs and in January 2004, Paul, Diana and Paula purchased Cold Springs R&D from its founder. In May 2021, Fil-Tech sold its Quality Crystal product line to INFICON and partnered with INFICON to supply the Fil-Tech crystals and distribute INFICON’s rate/thickness monitors and controllers and vacuum gauges worldwide. We still manufacture sensor heads and feedthroughs, custom hardware in stainless and copper, and sputter gun switch instrumentation.


Fil-Tech concentrate on quality, savings, and stock delivery on replacement parts. Our same day shipments keep you up and running. Please call us for cross reference information, pricing or technical advice. We will always personally answer your call and we are glad to help.


6 Pinckney St.
Boston, Massachusetts 02114
United States of America

Beacon Hill Boston, MA

Fax: 617-742-0686

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